邓 海

 课题组主页:http://www.polymer.fudan.edu.cn/polymer/research/denghai/

 

 

邓海  博士,教授 

HaI DENG   Ph.D.  Professor

Tel: +86-21-65643226

Email: haideng@fudan.edu.cn

DH.jpg

学习经历 (Education)

1984-1988

 

1990-1992

 

1992-1995

 

1996-1996

 

1997-1998

中山大学

Zhongshan University, China

京都大学

Kyoto university, Janpan

东京工业大学

Tokyo Institute of Technology, Janpan

美国阿克伦大学

University of Akron, USA

加利福尼亚大学伯克利分校

University of California, Berkeley, USA

学士

B.S

硕士

M.S.

博士

Ph.D.

博士后

Postdoctor

博士后

Postdoctor

工作经历 (Employment Experience)

1998-2000

 

2001-2014

 

2014-2015

 

2015至今

美国罗门哈斯公司

ROHM&HAAS Company, USA

美国英特尔公司

Intel Corporation, USA

東京応化工業株式会社美国分公司

TOK, USA

复旦大学

Fudan University

高级研究员

Senior researcher

高级主任工程师

Senior engineer

院士

Fellow

教授

Professor

研究领域 (Research Field)

1)极性单体的高度立体定向聚合;

2)半导体光刻用高分子材料的设计合成及应用;

3)半导体光刻用分子玻璃和导向自组装材料的设计合成及应用;

代表性论文 (Selected Publications)

1. ZEOLITE-SOL GEL NANO-COMPOSITE LOW K DIELECTRIC, H. Deng, US # 7,674,390 (2010)

2. IMMERSION LIQUIDS FOR IMMERSION LITHOGRAPHY; H. Deng et al, US # 7,391,501 (2008)

3. Sub-50 nm Feature Sizes Using Positive Tone Molecular Glass Resists for EUV Lithography. SW Chang, R Ayothi, D Bratton, D Yang, N Felix, HB Cao, H Deng, CK Ober. J. Mater. Chem., 2006, 16, 1470-1474

4. Study of the Structure−Properties Relationship of Phenolic Molecular Glass Resists for Next Generation Photolithography. A De Silva, JK Lee, X André, NM Felix, HB Cao, H Deng, CK Ober. Chem. Mater., 2008, 20 (4), 1606–1613

5. Acid Distribution in Chemically Amplified Extreme Ultraviolet Resist. T Kozawa, S Tagawa, HB Cao, H Deng, MJ Leeson. Journal of Vacuum Science & Technology B, 2007, 25 (6), 2481-2485

6. Polymerizable Lyotropic Liquid Crystals Containing Transition-Metal and Lanthanide Ions: Architectural Control and Introduction of New Properties into Nanostructured Polymers, H. Deng, D. L. Gin, R. Smith. J. Am. Chem. Soc. 1998, 120, 3522-3523

7. Isospecific Polymerization of MMA Initiated by Chiral Zirconocenedimethly/Ph3CB(C6F5)4 in the Presence of Lewis Acid, H. Deng, T. Shiono, K. Soga. Macromolecules, 1995, 28 (9), 067–3073

8. Isotactic Polymerization of t-Butyl Acrylate with Chiral Zirconocene, H. Deng, K. Soga. Macromolecules, 1996, 29 (5), 1847–1848